A Variable Zoom Optical System for Enhanced Stability in Semiconductor Inspection
Kangjun Zhao; Long Zhang; Ji Zhang; Youwei Huang; Xiaojun Tian
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Journal of Physics: Conference Series
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1742-6596/3223/1/012005
The original publisher provides the full text and its access options.
Cite this source
Kangjun Zhao; Long Zhang; Ji Zhang; Youwei Huang; Xiaojun Tian. A Variable Zoom Optical System for Enhanced Stability in Semiconductor Inspection. Journal of Physics: Conference Series. 2026-04-01. https://doi.org/10.1088/1742-6596/3223/1/012005