Constrained Dynamic Time Warping and Polyline Distance for Anomaly Detection in Semiconductor Manufacturing
Gangjiang Li; Yihong Hang; Zaizhou Yang; Zhice Yang
- Published
- Publisher
- MDPI AG
- Journal / collection
- Applied Sciences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/app16125779
The original publisher provides the full text and its access options.
Cite this source
Gangjiang Li; Yihong Hang; Zaizhou Yang; Zhice Yang. Constrained Dynamic Time Warping and Polyline Distance for Anomaly Detection in Semiconductor Manufacturing. Applied Sciences. 2026-06-08. https://doi.org/10.3390/app16125779