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Research literature / Conference paper

AFC Rule Check Framework for Construction Integrity of Semiconductor FAB MEP: Case Study

Yunhyung Lee; Seungwon Han; Sean Hay Kim

Published
Publisher
IEEE
Journal / collection
2025 5th International Conference on Robotics, Automation, and Artificial Intelligence (RAAI)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/raai67517.2025.11423221

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Yunhyung Lee; Seungwon Han; Sean Hay Kim. AFC Rule Check Framework for Construction Integrity of Semiconductor FAB MEP: Case Study. 2025 5th International Conference on Robotics, Automation, and Artificial Intelligence (RAAI). 2025-12-18. https://doi.org/10.1109/raai67517.2025.11423221

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