The curvy road to silicon photonics manufacturing
Sagar Saxena; Ujwol Palanchoke; Guillaume Chataignier; Vincent Berg; Cyril Bellegarde; Bilel Saidi; Nacer Zine El Abidine
- Published
- Publisher
- SPIE
- Journal / collection
- DTCO and Computational Patterning V
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3090474
The original publisher provides the full text and its access options.
Cite this source
Sagar Saxena; Ujwol Palanchoke; Guillaume Chataignier; Vincent Berg; Cyril Bellegarde; Bilel Saidi; Nacer Zine El Abidine. The curvy road to silicon photonics manufacturing. DTCO and Computational Patterning V. 2026-04-10. https://doi.org/10.1117/12.3090474