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Research literature / Preprint / posted paper

Reconstruction-based Wafer Anomaly Detection in Semiconductor Manufacturing with Point Transformers

Namkyeong Cho; Junseung Ryu; Youngwook Bin; Hyung Ju Hwang

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.6496447

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Namkyeong Cho; Junseung Ryu; Youngwook Bin; Hyung Ju Hwang. Reconstruction-based Wafer Anomaly Detection in Semiconductor Manufacturing with Point Transformers. Elsevier BV. 2026. https://doi.org/10.2139/ssrn.6496447

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