Lightweight Semantic-Guided FCOS for In-Line Micro-Defect Inspection in Semiconductor Manufacturing
Tao Zhang; Shichang Yan; Gaoe Qin
- Published
- Publisher
- MDPI AG
- Journal / collection
- Micromachines
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/mi17040473
The original publisher provides the full text and its access options.
Cite this source
Tao Zhang; Shichang Yan; Gaoe Qin. Lightweight Semantic-Guided FCOS for In-Line Micro-Defect Inspection in Semiconductor Manufacturing. Micromachines. 2026-04-14. https://doi.org/10.3390/mi17040473