Semiconductor manufacturing for wafer ID recognition system developed by object detection framework
Yuan-Tzu Lin; Wei-Chang Yeh; Zhenyao Liu; Chia-Ling Huang
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- The International Journal of Advanced Manufacturing Technology
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s00170-025-17384-9
The original publisher provides the full text and its access options.
Cite this source
Yuan-Tzu Lin; Wei-Chang Yeh; Zhenyao Liu; Chia-Ling Huang. Semiconductor manufacturing for wafer ID recognition system developed by object detection framework. The International Journal of Advanced Manufacturing Technology. 2026-02-25. https://doi.org/10.1007/s00170-025-17384-9