Recent progress in optical nanometrology for the semiconductor industry
Lauryna Siaudinyte; Poul-Erik Hansen
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Measurement: Sensors
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.measen.2024.101607
The original publisher provides the full text and its access options.
Cite this source
Lauryna Siaudinyte; Poul-Erik Hansen. Recent progress in optical nanometrology for the semiconductor industry. Measurement: Sensors. 2025-05. https://doi.org/10.1016/j.measen.2024.101607