Effects of Ionizer Installation Conditions on Electrostatic Control Performance during Semiconductor Fabrication
Taesun Hong; Taehwan Kim; Min uk Lee
- Published
- Publisher
- The Korean Society of Manufacturing Technology Engineers
- Journal / collection
- Journal of the Korean Society of Manufacturing Technology Engineers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7735/ksmte.2025.34.5.315
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Cite this source
Taesun Hong; Taehwan Kim; Min uk Lee. Effects of Ionizer Installation Conditions on Electrostatic Control Performance during Semiconductor Fabrication. Journal of the Korean Society of Manufacturing Technology Engineers. 2025-10-15. https://doi.org/10.7735/ksmte.2025.34.5.315