Reflective lensless through-silicon phase imaging for advanced semiconductor packaging metrology
Aleksandr Vlasov; Igor Shevkunov; Karen Eguiazarian; Mircea Guina; Jukka Viheriälä
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Applied Physics Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0333722
The original publisher provides the full text and its access options.
Cite this source
Aleksandr Vlasov; Igor Shevkunov; Karen Eguiazarian; Mircea Guina; Jukka Viheriälä. Reflective lensless through-silicon phase imaging for advanced semiconductor packaging metrology. Applied Physics Letters. 2026-07-06. https://doi.org/10.1063/5.0333722