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Research literature / Conference paper

Improving Machine Calibration Performance through Systematic Feature Design in Semiconductor Manufacturing

Dai-Yan Ji; Masahiro Sumiya; Yoshito Kamaji; Satoru Matsukura; Wenzhe Li; Jay Lee

Published
Publisher
IEEE
Journal / collection
2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc64512.2025.11010366

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Dai-Yan Ji; Masahiro Sumiya; Yoshito Kamaji; Satoru Matsukura; Wenzhe Li; Jay Lee. Improving Machine Calibration Performance through Systematic Feature Design in Semiconductor Manufacturing. 2025 36th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2025-05-05. https://doi.org/10.1109/asmc64512.2025.11010366

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