High-Performance IGZO-based DrMOS with Vertical Channel Power Transistor for Monolithic 3D Integrated Active PDNs with On-Chip Voltage Conversion
Yijia Fan; Jianshi Tang; Yanbo Su; Hu Zhou; Rongmei Chen; Xiaosen Liu; Hongsen Zhang; Kexin Wang; Zhidong Tang; Yibei Zhang; Jiaming Li; Jianing Li; Linqiu Wang; Yiwei Du; Peng Yao; Bin Gao; He Qian; Huaqiang Wu
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE International Electron Devices Meeting (IEDM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/iedm50572.2025.11353816
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Cite this source
Yijia Fan; Jianshi Tang; Yanbo Su; Hu Zhou; Rongmei Chen; Xiaosen Liu; Hongsen Zhang; Kexin Wang; Zhidong Tang; Yibei Zhang; Jiaming Li; Jianing Li; Linqiu Wang; Yiwei Du; Peng Yao; Bin Gao; He Qian; Huaqiang Wu. High-Performance IGZO-based DrMOS with Vertical Channel Power Transistor for Monolithic 3D Integrated Active PDNs with On-Chip Voltage Conversion. 2025 IEEE International Electron Devices Meeting (IEDM). 2025-12-06. https://doi.org/10.1109/iedm50572.2025.11353816