Modeling and Optimization of Diffusion Process Scheduling under Strict Queue Time Constraints in Semiconductor Manufacturing
Liangchao Chen; Yan Qiao; Siwei Zhang; Bin Liu; Yonghua Shao; Sijun Zhan
- Published
- Publisher
- Tech Science Press
- Journal / collection
- Computer Modeling in Engineering & Sciences
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.32604/cmes.2026.076245
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Cite this source
Liangchao Chen; Yan Qiao; Siwei Zhang; Bin Liu; Yonghua Shao; Sijun Zhan. Modeling and Optimization of Diffusion Process Scheduling under Strict Queue Time Constraints in Semiconductor Manufacturing. Computer Modeling in Engineering & Sciences. 2026. https://doi.org/10.32604/cmes.2026.076245