Intelligent OPC Engineer Assistant for Semiconductor Manufacturing
Guojin Chen; Haoyu Yang; Bei Yu; Haoxing Ren
- Published
- Publisher
- Association for the Advancement of Artificial Intelligence (AAAI)
- Journal / collection
- Proceedings of the AAAI Conference on Artificial Intelligence
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1609/aaai.v39i22.34479
The original publisher provides the full text and its access options.
Cite this source
Guojin Chen; Haoyu Yang; Bei Yu; Haoxing Ren. Intelligent OPC Engineer Assistant for Semiconductor Manufacturing. Proceedings of the AAAI Conference on Artificial Intelligence. 2025-04-11. https://doi.org/10.1609/aaai.v39i22.34479