Precision Matching Optimization of Optical Metrology and Inspection Equipment for Yield Enhancement in Semiconductor Manufacturing
Hyoseop Shin; Hojun Lee; Dongkun Shin
- Published
- Publisher
- The Institute of Electronics Engineers of Korea
- Journal / collection
- JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.5573/jsts.2025.25.6.623
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Cite this source
Hyoseop Shin; Hojun Lee; Dongkun Shin. Precision Matching Optimization of Optical Metrology and Inspection Equipment for Yield Enhancement in Semiconductor Manufacturing. JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE. 2025-12-31. https://doi.org/10.5573/jsts.2025.25.6.623