Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges
Hongmei Li; Hongwei Wang; Yuxin Li; Xiwen Lu; Lin Li; Yinzhou Yan; Wei Guo
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Discover Nano
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1186/s11671-025-04309-4
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Cite this source
Hongmei Li; Hongwei Wang; Yuxin Li; Xiwen Lu; Lin Li; Yinzhou Yan; Wei Guo. Micro-nanoscale laser subsurface vertical modification of 4H-SiC semiconductor materials: mechanisms, processes, and challenges. Discover Nano. 2025-07-16. https://doi.org/10.1186/s11671-025-04309-4