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Research literature / Conference paper

Safety management of hazardous chemicals in semiconductor wafer cleaning equipment focus of subcontractor practices

Published
Publisher
Modelling and Simulation Society of Australia and New Zealand
Journal / collection
MODSIM2025, 26th International Congress on Modelling and Simulation.
Research area
Semiconductors
Source type
Conference paper
DOI
10.36334/modsim2025.h01.lee

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Modelling and Simulation Society of Australia and New Zealand. Safety management of hazardous chemicals in semiconductor wafer cleaning equipment focus of subcontractor practices. MODSIM2025, 26th International Congress on Modelling and Simulation.. 2026-05-01. https://doi.org/10.36334/modsim2025.h01.lee

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