Etching of Dielectric Contact Hole of Thin Film Transistor with Low-GWP Gas
Junsoo Lee; Junwon Jeong; Jongwoo Hong; Geunyoung Yeom
- Published
- Publisher
- International Display Workshops General Incorporated Association
- Journal / collection
- Proceedings of the International Display Workshops
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.36463/idw.2025.0560
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Cite this source
Junsoo Lee; Junwon Jeong; Jongwoo Hong; Geunyoung Yeom. Etching of Dielectric Contact Hole of Thin Film Transistor with Low-GWP Gas. Proceedings of the International Display Workshops. 2025-12-04. https://doi.org/10.36463/idw.2025.0560