Physics-Regularized Self-Supervised Anomaly Detection for Semiconductor Tools with Digital Twin Guidance
Min Yin
- Published
- Publisher
- EWA Publishing
- Journal / collection
- Applied and Computational Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.54254/2755-2721/2025.28669
The original publisher provides the full text and its access options.
Cite this source
Min Yin. Physics-Regularized Self-Supervised Anomaly Detection for Semiconductor Tools with Digital Twin Guidance. Applied and Computational Engineering. 2025-10-28. https://doi.org/10.54254/2755-2721/2025.28669