PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing
Wenjie Kong; Wenyuan Zhang; Ling Qin; Dinghai Gong
- Published
- Publisher
- MDPI AG
- Journal / collection
- Nanomaterials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/nano16161026
The original publisher provides the full text and its access options.
Cite this source
Wenjie Kong; Wenyuan Zhang; Ling Qin; Dinghai Gong. PWDD-Net: A Patterned Wafer Defect Detection Network for Semiconductor Manufacturing. Nanomaterials. 2026-08-19. https://doi.org/10.3390/nano16161026