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Nanoscale-to-atomic unraveling of sequential etching pathways in metal-semiconductor heterostructures

Bin Chen; Yong Lu; Simin Peng; Wenlong Wang

Published
Publisher
Springer Science and Business Media LLC
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.21203/rs.3.rs-9269320/v1

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Bin Chen; Yong Lu; Simin Peng; Wenlong Wang. Nanoscale-to-atomic unraveling of sequential etching pathways in metal-semiconductor heterostructures. Springer Science and Business Media LLC. 2026-04-22. https://doi.org/10.21203/rs.3.rs-9269320/v1

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