Temporally shaped femtosecond laser pulses for micromachining applications with dielectric, semiconductor and metallic materials
Cristian Sarpe; Florian Fiedler; Omar Elsheikh; Bastian Zielinski; Camilo Florian
- Published
- Publisher
- SPIE
- Journal / collection
- Lasers and Photonics for Advanced Manufacturing II
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3106297
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Cite this source
Cristian Sarpe; Florian Fiedler; Omar Elsheikh; Bastian Zielinski; Camilo Florian. Temporally shaped femtosecond laser pulses for micromachining applications with dielectric, semiconductor and metallic materials. Lasers and Photonics for Advanced Manufacturing II. 2026-05-29. https://doi.org/10.1117/12.3106297