The Crucial Role of TEM Specimen Preparation in STEM EBIC Analysis of Advanced Semiconductor Devices
C S Bonifacio; W Hubbard; R Li; M L Ray; P Fischione
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozaf048.887
The original publisher provides the full text and its access options.
Cite this source
C S Bonifacio; W Hubbard; R Li; M L Ray; P Fischione. The Crucial Role of TEM Specimen Preparation in STEM EBIC Analysis of Advanced Semiconductor Devices. Microscopy and Microanalysis. 2025-07. https://doi.org/10.1093/mam/ozaf048.887