Enhanced light element analysis using dual EDS detectors in advanced semiconductor structures
Taeseok Seong; Seonje Kim; Heebeom Lee; Yuseong Jang; Chulgi Song
- Published
- Publisher
- Oxford University Press (OUP)
- Journal / collection
- Microscopy and Microanalysis
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1093/mam/ozag053.293
The original publisher provides the full text and its access options.
Cite this source
Taeseok Seong; Seonje Kim; Heebeom Lee; Yuseong Jang; Chulgi Song. Enhanced light element analysis using dual EDS detectors in advanced semiconductor structures. Microscopy and Microanalysis. 2026-07. https://doi.org/10.1093/mam/ozag053.293