Investigation of the Mechanism of Mixed-Gas Plasma Modulation of Indium Oxide Thin-Film Transistor Performance
Han-Lin Zhao; Xiao-Lin Wang; Sung-Jin Kim
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Device and Materials Reliability
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tdmr.2025.3572184
The original publisher provides the full text and its access options.
Cite this source
Han-Lin Zhao; Xiao-Lin Wang; Sung-Jin Kim. Investigation of the Mechanism of Mixed-Gas Plasma Modulation of Indium Oxide Thin-Film Transistor Performance. IEEE Transactions on Device and Materials Reliability. 2025-09. https://doi.org/10.1109/tdmr.2025.3572184