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Research literature / Conference paper

A Proposal for MLPNN and PSO Based Semiconductor Process Optimization Framework

Mu-Hua Wang; Da-Wei Wang; Wen-Sheng Zhao

Published
Publisher
IEEE
Journal / collection
2025 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/nemo62710.2025.11215233

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Mu-Hua Wang; Da-Wei Wang; Wen-Sheng Zhao. A Proposal for MLPNN and PSO Based Semiconductor Process Optimization Framework. 2025 IEEE MTT-S International Conference on Numerical Electromagnetic and Multiphysics Modeling and Optimization (NEMO). 2025-07-29. https://doi.org/10.1109/nemo62710.2025.11215233

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