Data-efficient AI framework for optimizing germanium epitaxial layer growth in semiconductor processes
Furen Zhuang; Ashish James; Xuan Sang Nguyen; Hyunsu Jun; Peisheng Qian; Zhongyao Cheng; Shiv Kumar; Navab Singh
- Published
- Publisher
- SPIE
- Journal / collection
- Silicon Photonics XXI
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3078435
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Cite this source
Furen Zhuang; Ashish James; Xuan Sang Nguyen; Hyunsu Jun; Peisheng Qian; Zhongyao Cheng; Shiv Kumar; Navab Singh. Data-efficient AI framework for optimizing germanium epitaxial layer growth in semiconductor processes. Silicon Photonics XXI. 2026-03-04. https://doi.org/10.1117/12.3078435