Pixel-Level Anomaly Detection via Deformable Registration for Semiconductor TEM Images
Fei Ye; Pu Shi; Shengsen Zhou
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 IEEE International Conference on Pattern Recognition, Machine Vision and Artificial Intelligence (PRMVAI)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/prmvai70103.2026.11605930
The original publisher provides the full text and its access options.
Cite this source
Fei Ye; Pu Shi; Shengsen Zhou. Pixel-Level Anomaly Detection via Deformable Registration for Semiconductor TEM Images. 2026 IEEE International Conference on Pattern Recognition, Machine Vision and Artificial Intelligence (PRMVAI). 2026-05. https://doi.org/10.1109/prmvai70103.2026.11605930