A Lot Release Scheduling Problem for Semiconductor Cluster Tools with Parallel Chambers
Seong-Bo Hwang; Yun-Seo Noh; Ga-Young Lee; Ga-Young Ha; Jun-hee Han
- Published
- Publisher
- The Korean Operations and Management Science Society
- Journal / collection
- Journal of the Korean Operations Research and Management Science Society
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7737/jkorms.2025.50.3.001
The original publisher provides the full text and its access options.
Cite this source
Seong-Bo Hwang; Yun-Seo Noh; Ga-Young Lee; Ga-Young Ha; Jun-hee Han. A Lot Release Scheduling Problem for Semiconductor Cluster Tools with Parallel Chambers. Journal of the Korean Operations Research and Management Science Society. 2025-08-31. https://doi.org/10.7737/jkorms.2025.50.3.001