AI-assisted anomaly detection from SEM images in semiconductor fabrication
Hyunsu Jeong; Chiho Yoon; Hyunseok Lim; Jaesuk Chang; Sampa Misra; Chulhong Kim
- Published
- Publisher
- SPIE
- Journal / collection
- AI and Optical Data Sciences VII
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3078128
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Cite this source
Hyunsu Jeong; Chiho Yoon; Hyunseok Lim; Jaesuk Chang; Sampa Misra; Chulhong Kim. AI-assisted anomaly detection from SEM images in semiconductor fabrication. AI and Optical Data Sciences VII. 2026-03-06. https://doi.org/10.1117/12.3078128