ComputPlasma – An Indigenous Plasma Simulator for Semiconductor Process Modeling
Siddharth Mohanty; Sandeep Kumar Swain; Om Maheshwari; Pardeep Kumar; Nihar R. Mohapatra
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE 7th International Conference on Emerging Electronics (ICEE)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/icee67165.2025.11409843
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Cite this source
Siddharth Mohanty; Sandeep Kumar Swain; Om Maheshwari; Pardeep Kumar; Nihar R. Mohapatra. ComputPlasma – An Indigenous Plasma Simulator for Semiconductor Process Modeling. 2025 IEEE 7th International Conference on Emerging Electronics (ICEE). 2025-12-13. https://doi.org/10.1109/icee67165.2025.11409843