Membrane technologies for ultrapure water production in the semiconductor industry: Recent developments and prospects
Duc Viet Nguyen; Ngoc Thuy Vu; Thi Thai Yen Doan; Khac-Uan Do; Thu Huong Thi Hoang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Environmental Chemical Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jece.2026.122514
The original publisher provides the full text and its access options.
Cite this source
Duc Viet Nguyen; Ngoc Thuy Vu; Thi Thai Yen Doan; Khac-Uan Do; Thu Huong Thi Hoang. Membrane technologies for ultrapure water production in the semiconductor industry: Recent developments and prospects. Journal of Environmental Chemical Engineering. 2026-06. https://doi.org/10.1016/j.jece.2026.122514