ADVANCED HVAC AND THERMAL MANAGEMENT SYSTEMS FOR SEMICONDUCTOR CLEANROOMS: ENGINEERING CHALLENGES AND FUTURE TECHNOLOGIES
Babajide Aremu R; Olalekan Solomon O; Tunmise Emmanuel A; Oyegbesan Hammed O; Ojonugwa Mathew. F
- Published
- Publisher
- IAEME Publication
- Journal / collection
- INTERNATIONAL JOURNAL OF MECHANICAL ENGINEERING AND TECHNOLOGY (IJMET)
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.34218/ijmet_17_04_002
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Cite this source
Babajide Aremu R; Olalekan Solomon O; Tunmise Emmanuel A; Oyegbesan Hammed O; Ojonugwa Mathew. F. ADVANCED HVAC AND THERMAL MANAGEMENT SYSTEMS FOR SEMICONDUCTOR CLEANROOMS: ENGINEERING CHALLENGES AND FUTURE TECHNOLOGIES. INTERNATIONAL JOURNAL OF MECHANICAL ENGINEERING AND TECHNOLOGY (IJMET). 2026-08-31. https://doi.org/10.34218/ijmet_17_04_002