AMR-Based Automated Material Handling in Semiconductor Fabs: A Discrete Event Simulation Study
Gaetano Muscatello; Matteo Carabelli; Tullio Tolio; Maria Chiara Magnanini
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Procedia CIRP
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.procir.2026.03.166
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Cite this source
Gaetano Muscatello; Matteo Carabelli; Tullio Tolio; Maria Chiara Magnanini. AMR-Based Automated Material Handling in Semiconductor Fabs: A Discrete Event Simulation Study. Procedia CIRP. 2026. https://doi.org/10.1016/j.procir.2026.03.166