Optimisation method for semiconductor wafer manufacturing system scheduling: Reinforcement learning with decision graph guiding
Da Chen; Jie Zhang; Lihui Wu; Peng Zhang; Youlong Lv; Junliang Wang; Hong Wang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2025.08.004
The original publisher provides the full text and its access options.
Cite this source
Da Chen; Jie Zhang; Lihui Wu; Peng Zhang; Youlong Lv; Junliang Wang; Hong Wang. Optimisation method for semiconductor wafer manufacturing system scheduling: Reinforcement learning with decision graph guiding. Journal of Manufacturing Systems. 2025-10. https://doi.org/10.1016/j.jmsy.2025.08.004