Multiple-time Reentrant Process Optimization of Cluster Tools in Semiconductor Manufacturing
Yunfang He; Yiming Lai; Yonghua Shao; Mohammadhossein Ghahramani; Siwei Zhang; Yan Qiao
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 5th International Symposium on Semiconductor and Electronic Technology (ISSET)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/isset70600.2026.11682639
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Cite this source
Yunfang He; Yiming Lai; Yonghua Shao; Mohammadhossein Ghahramani; Siwei Zhang; Yan Qiao. Multiple-time Reentrant Process Optimization of Cluster Tools in Semiconductor Manufacturing. 2026 5th International Symposium on Semiconductor and Electronic Technology (ISSET). 2026-07. https://doi.org/10.1109/isset70600.2026.11682639