Demonstration of Performance Enhancement in Semiconductor Devices Utilizing TiO₂-Based High-k Triple-Layer Dielectric
Seong-Kyum Kim; Seul-Ki Hong
- Published
- Publisher
- The Institute of Electronics Engineers of Korea
- Journal / collection
- JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.5573/jsts.2026.26.1.24
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Cite this source
Seong-Kyum Kim; Seul-Ki Hong. Demonstration of Performance Enhancement in Semiconductor Devices Utilizing TiO₂-Based High-k Triple-Layer Dielectric. JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE. 2026-02-28. https://doi.org/10.5573/jsts.2026.26.1.24