CryoFormer-KANNet: An End-to-End Cloud–Edge Fault Diagnosis Framework for Semiconductor Cryopumps
Yu-Qing Wang; Jian-Hao Zhu; Xu-Di Wang; Da-Cheng Ao; Mu-Yao Wu
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Instrumentation and Measurement
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/tim.2026.3712941
The original publisher provides the full text and its access options.
Cite this source
Yu-Qing Wang; Jian-Hao Zhu; Xu-Di Wang; Da-Cheng Ao; Mu-Yao Wu. CryoFormer-KANNet: An End-to-End Cloud–Edge Fault Diagnosis Framework for Semiconductor Cryopumps. IEEE Transactions on Instrumentation and Measurement. 2026. https://doi.org/10.1109/tim.2026.3712941