A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment
Jiefeng Peng; Liang Hu; Rui Su; Yingnan Shen; Jing Wang; Xin Fu; Xiaodong Ruan
- Published
- Publisher
- MDPI AG
- Journal / collection
- Micromachines
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.3390/mi17030287
The original publisher provides the full text and its access options.
Cite this source
Jiefeng Peng; Liang Hu; Rui Su; Yingnan Shen; Jing Wang; Xin Fu; Xiaodong Ruan. A Physics-Informed Hybrid Neural Network for High-Precision Temperature Prediction in Semiconductor Process Equipment. Micromachines. 2026-02-25. https://doi.org/10.3390/mi17030287