Graphene Field-Effect Transistor Process and Analysis Optimization in 200 mm Pilot-Line Environment
Anton Murros; Miika Soikkeli; Anni Virta; Arantxa Maestre; Leire Morillo; Alba Centeno; Amaia Zurutuza; Olli-Pekka Kilpi
- Published
- Publisher
- American Chemical Society (ACS)
- Journal / collection
- ACS Nano
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1021/acsnano.6c03282
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Cite this source
Anton Murros; Miika Soikkeli; Anni Virta; Arantxa Maestre; Leire Morillo; Alba Centeno; Amaia Zurutuza; Olli-Pekka Kilpi. Graphene Field-Effect Transistor Process and Analysis Optimization in 200 mm Pilot-Line Environment. ACS Nano. 2026-09-09. https://doi.org/10.1021/acsnano.6c03282