An Ensemble Virtual Metrology Model of Machine Learning in Semiconductor Manufacturing
Yawei Chen; Shaohua Chang; Eric Chien
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE 18th International Symposium on Embedded Multicore/Many-core Systems-on-Chip (MCSoC)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/mcsoc67473.2025.00118
The original publisher provides the full text and its access options.
Cite this source
Yawei Chen; Shaohua Chang; Eric Chien. An Ensemble Virtual Metrology Model of Machine Learning in Semiconductor Manufacturing. 2025 IEEE 18th International Symposium on Embedded Multicore/Many-core Systems-on-Chip (MCSoC). 2025-12-15. https://doi.org/10.1109/mcsoc67473.2025.00118