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Research literature / Conference paper

WAT Data Generation with Classifier-Free Guided Diffusion Model for Semiconductor Process Prediction

Liangyao Deng; Weijianxiong Ren; Yan Zhang; Jinxu Liu; Kangkang Zhang; Ziqi Wang; Yongpeng Cheng

Published
Publisher
IEEE
Journal / collection
2026 Conference of Science and technology of Integrated Circuits (CSTIC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/cstic68613.2026.11537909

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Liangyao Deng; Weijianxiong Ren; Yan Zhang; Jinxu Liu; Kangkang Zhang; Ziqi Wang; Yongpeng Cheng. WAT Data Generation with Classifier-Free Guided Diffusion Model for Semiconductor Process Prediction. 2026 Conference of Science and technology of Integrated Circuits (CSTIC). 2026-03-22. https://doi.org/10.1109/cstic68613.2026.11537909

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