High performance of MoNbTi alloy barriers for copper metallization of semiconductor display
Xuefeng Zhang; Lijia Chen; Shuaifang Li; Xuguang Song; Xiaochao Wu; Kaijie Gu; Wengao Pan; Qingkui Li
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Alloys and Compounds
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jallcom.2026.189214
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Cite this source
Xuefeng Zhang; Lijia Chen; Shuaifang Li; Xuguang Song; Xiaochao Wu; Kaijie Gu; Wengao Pan; Qingkui Li. High performance of MoNbTi alloy barriers for copper metallization of semiconductor display. Journal of Alloys and Compounds. 2026-07. https://doi.org/10.1016/j.jallcom.2026.189214