Step-Aware Cross-View Transformer for Unsupervised Semiconductor Manufacturing Equipment Anomaly Detection
Sunuwe Kim; Junho Hwang; Sangwook Park
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Internet of Things Journal
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/jiot.2026.3677542
The original publisher provides the full text and its access options.
Cite this source
Sunuwe Kim; Junho Hwang; Sangwook Park. Step-Aware Cross-View Transformer for Unsupervised Semiconductor Manufacturing Equipment Anomaly Detection. IEEE Internet of Things Journal. 2026-06-15. https://doi.org/10.1109/jiot.2026.3677542