Study on the Interfacial Behavior of W CMP on SiGe Film for Disruptive Semiconductor Devices
Jeehwan Heo; Juyeon Han; Sangwon Byun; Seokjun Hong; Jinwoo Bae; Jong Hyuk PARK; Bo UN Yoon
- Published
- Publisher
- The Electrochemical Society
- Journal / collection
- ECS Meeting Abstracts
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1149/ma2026-01211200mtgabs
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Cite this source
Jeehwan Heo; Juyeon Han; Sangwon Byun; Seokjun Hong; Jinwoo Bae; Jong Hyuk PARK; Bo UN Yoon. Study on the Interfacial Behavior of W CMP on SiGe Film for Disruptive Semiconductor Devices. ECS Meeting Abstracts. 2026-07-07. https://doi.org/10.1149/ma2026-01211200mtgabs