Development of safety certification standards for semiconductor equipment for prevention of occupational accidents in Korea: A methodology based on semiconductor equipment and materials international (SEMI) standards
Seung Nam Min; Sanghyun Kim; Dong Joon Kim; Chankyu Kang
- Published
- Publisher
- SAGE Publications
- Journal / collection
- WORK: A Journal of Prevention, Assessment & Rehabilitation
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1177/10519815251340978
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Cite this source
Seung Nam Min; Sanghyun Kim; Dong Joon Kim; Chankyu Kang. Development of safety certification standards for semiconductor equipment for prevention of occupational accidents in Korea: A methodology based on semiconductor equipment and materials international (SEMI) standards. WORK: A Journal of Prevention, Assessment & Rehabilitation. 2025-05-21. https://doi.org/10.1177/10519815251340978