Research on the Application of Visual Anomaly Detection Technology in Semiconductor Wafer Inspection
Bairu Chen; Hanguang Su
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 6th International Conference on Computer, Control and Robotics (ICCCR)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/icccr69988.2026.11642647
The original publisher provides the full text and its access options.
Cite this source
Bairu Chen; Hanguang Su. Research on the Application of Visual Anomaly Detection Technology in Semiconductor Wafer Inspection. 2026 6th International Conference on Computer, Control and Robotics (ICCCR). 2026-05. https://doi.org/10.1109/icccr69988.2026.11642647