Efficient Semiconductor Process Modeling with PGD Augmentation and Knowledge Distillation
Yingqiang Hu; Weiping Xie; Yining Chen
- Published
- Publisher
- IEEE
- Journal / collection
- 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/edtm65772.2026.11497205
The original publisher provides the full text and its access options.
Cite this source
Yingqiang Hu; Weiping Xie; Yining Chen. Efficient Semiconductor Process Modeling with PGD Augmentation and Knowledge Distillation. 2026 10th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2026-03-01. https://doi.org/10.1109/edtm65772.2026.11497205