Autoregressive DRL for Multi-Robot Scheduling in Semiconductor Cluster Tools
Soo-Hwan Cho; Jean Seong Bjorn Choe; Jong-Kook Kim
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 IEEE 34th International Symposium on Industrial Electronics (ISIE)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/isie62713.2025.11124688
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Cite this source
Soo-Hwan Cho; Jean Seong Bjorn Choe; Jong-Kook Kim. Autoregressive DRL for Multi-Robot Scheduling in Semiconductor Cluster Tools. 2025 IEEE 34th International Symposium on Industrial Electronics (ISIE). 2025-06-20. https://doi.org/10.1109/isie62713.2025.11124688