Research on pollution prevention and control in semiconductor process tool and mini-environment
Shih-Cheng Hu; Tee Lin; Omid Ali Zargar; Shih-Hsun Chu; Yang-Cheng Shih; Graham Leggett
- Published
- Publisher
- Elsevier BV
- Journal / collection
- International Journal of Thermofluids
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.ijft.2026.101572
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Cite this source
Shih-Cheng Hu; Tee Lin; Omid Ali Zargar; Shih-Hsun Chu; Yang-Cheng Shih; Graham Leggett. Research on pollution prevention and control in semiconductor process tool and mini-environment. International Journal of Thermofluids. 2026-03. https://doi.org/10.1016/j.ijft.2026.101572